| Autor: |
Shinji Sakaguchi, Sobhy Tadros, Bernard T. Beauchemin, Kenji Honda, Andrew J. Blakeney, Rodney J. Hurditch, Shiro Tan, Edward A. Fitzgerald, Alfred T. Jeffries |
| Rok vydání: |
1991 |
| Předmět: |
|
| Zdroj: |
Advances in Resist Technology and Processing VIII. |
| ISSN: |
0277-786X |
| DOI: |
10.1117/12.46365 |
| Popis: |
A p-cresol trimer sequence was incorporated into a polymeric chain of novolak by copolymerization with m-cresol of a reactive precursor which was prepared by attaching two units of m-cresol to the terminal ortho positions of p-cresol trimer. The resulting novolak was characterized by 13C NMR and FTIR in an attempt to correlate novolak structure with dissolution inhibition function based on physicochemical analysis of molecular interactions between novolak and DNQ-PAC in solid films. |
| Databáze: |
OpenAIRE |
| Externí odkaz: |
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