In situ analysis of growth rate evolution during molecular layer deposition of ultra-thin polyurea films using aliphatic and aromatic precursors
| Autor: | Rachel A. Nye, Siyao Wang, Stefan Uhlenbrock, John A. Smythe, Gregory N. Parsons |
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| Rok vydání: | 2022 |
| Předmět: | |
| Zdroj: | Dalton Transactions. 51:1838-1849 |
| ISSN: | 1477-9234 1477-9226 |
| DOI: | 10.1039/d1dt03689k |
| Popis: | MLD growth evolution depends on the deposition surface and monomer structure of the deposited film. |
| Databáze: | OpenAIRE |
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