Site control technique for quantum dots using electron beam induced deposition
| Autor: | Kanji Iizuka, Hiroshi Yokota, JaeHun Jung |
|---|---|
| Rok vydání: | 2014 |
| Předmět: |
Materials science
Photoluminescence business.industry Annealing (metallurgy) Ultra-high vacuum Analytical chemistry Physics::Optics chemistry.chemical_element Condensed Matter::Mesoscopic Systems and Quantum Hall Effect Arsenide Condensed Matter::Materials Science chemistry.chemical_compound chemistry Quantum dot Optoelectronics Electron beam-induced deposition business Molecular beam Indium |
| Zdroj: | AIP Conference Proceedings. |
| ISSN: | 0094-243X |
| DOI: | 10.1063/1.4878281 |
| Popis: | To develop simple and high throughput sit definition technique for quantum dots (QDs), the electron beam induced deposition (EBID) method was used as desorption guide of phosphorus atoms form InP substrate. As the results one or a few indium (In) droplets (DLs) were created in the carbon grid pattern by thermal annealing at a temperature of 450°C for 10 min in the ultra high vacuum condition. The size of In DLs was larger than QDs, but arsenide DLs by molecular beam in growth chamber emitted wavelength of 1.028μm at 50K by photoluminescence measurement. |
| Databáze: | OpenAIRE |
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