Fabrication of superconducting nanowire single-photon detectors by nonlinear femtosecond optical lithography
| Autor: | V. N. Bagratashvili, Boris N. Chichkov, M A Tarkhov, Nikita V. Minaev, D. S. Dudova, Peter S. Timashev |
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| Rok vydání: | 2018 |
| Předmět: |
Fabrication
Materials science Photon Physics and Astronomy (miscellaneous) business.industry Nanowire 02 engineering and technology 021001 nanoscience & nanotechnology Laser 01 natural sciences law.invention law Etching (microfabrication) 0103 physical sciences Femtosecond Optoelectronics Quantum efficiency Photolithography 010306 general physics 0210 nano-technology business Instrumentation |
| Zdroj: | Laser Physics Letters. 15:026002 |
| ISSN: | 1612-202X 1612-2011 |
| Databáze: | OpenAIRE |
| Externí odkaz: |
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