Effect of Copper on the Breakthrough Voltage of Poly-Si - Poly-Si Capacitors

Autor:	M. Rygula, Joseph Zahka, J.E. Pillion, M. Boehringer, H. Zhang, P. Brauchle, D. Aquino, G. Zielonka, J. Hauber, K. Winz, V. Erdmann
Rok vydání:	2001
Předmět:	Capacitor Materials science chemistry law Metallurgy Copper plating chemistry.chemical_element General Materials Science Condensed Matter Physics Copper Atomic and Molecular Physics and Optics law.invention Voltage
Zdroj:	Solid State Phenomena. :279-282
ISSN:	1662-9779
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::16c442e5eba29dc47204533ae7ce4dcc https://doi.org/10.4028/www.scientific.net/ssp.76-77.279 Zobrazit plný text záznamu