In Situ Reaction Mechanism Studies on the New tBuN=M(NEt2)3 -Water and tBuN=M(NEt2)3 - Ozone (M = Nb,Ta) Atomic Layer Deposition Processes
| Autor: | Kjell Knapas, Yoann Tomczak, Markku R. Sundberg, Markku Leskelä, Mikko Ritala |
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| Rok vydání: | 2012 |
| Předmět: |
010302 applied physics
Reaction mechanism Ozone Ligand General Chemical Engineering Analytical chemistry 02 engineering and technology General Chemistry Quartz crystal microbalance 021001 nanoscience & nanotechnology Mass spectrometry 01 natural sciences 3. Good health chemistry.chemical_compound Atomic layer deposition chemistry 0103 physical sciences Quadrupole Materials Chemistry Niobium oxide 0210 nano-technology |
| Zdroj: | Chemistry of Materials. 24:1555-1561 |
| ISSN: | 1520-5002 0897-4756 |
| Popis: | In this work, quartz crystal microbalance (QCM) and quadrupole mass spectrometry (QMS) have been used for in situ investigations of the D2O and ozone processes at 250 °C for tBuN=Nb(NEt2)3 and tBuN=Ta(NEt2)3. In the D2O processes, the ligand exchange reaction is demonstrated by the formation of D2NtBu and DNEt2 as byproduct. For tBuN=Nb(NEt2)3, one out of three -NEt2 ligands is exchanged during the precursor pulse, whereas for tBuN=Ta(NEt2)3, it is 1.7 -NEt2 ligands and 0.3 =NtBu ligand that are exchanged during the tBuN=Ta(NEt2)3 pulse. This difference in the reaction mechanism of the two structurally similar precursors can be explained by the differences in their bond polarities as shown by our quantum chemical calculations. Regarding the ozone processes, QCM results point to a molecular adsorption of tBuN=Nb(NEt2)3 and an exchange of at least two ligands for tBuN=Ta(NEt2)3. QMS indicates a typical ozone combustion byproduct, such as CO2 (m/z = 44), CO (m/z = 28), H2O (m/z = 18), and NO (m/z = 30) or N2... |
| Databáze: | OpenAIRE |
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