Autor:	Slava Krylov, Yoav Kessler, Alex Liberzon
Rok vydání:	2021
Předmět:	Materials science Optics Bistability business.industry Mechanical Engineering Microbeam Electrical and Electronic Engineering business
Zdroj:	Journal of Microelectromechanical Systems. 30:980-989
ISSN:	1941-0158 1057-7157
DOI:	10.1109/jmems.2021.3117838
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::1694dd6bc7abc4c9e8a0a20936998578 https://doi.org/10.1109/jmems.2021.3117838 Zobrazit plný text záznamu