Phase-shifting interferometric profilometry with a wavelength-tunable diode source

Autor:	Takeshi Takahashi, Ribun Onodera, Yukihiro Ishii
Rok vydání:	2014
Předmět:	Quantum optics Materials science Laser diode business.industry Phase (waves) Physics::Optics Interference (wave propagation) Atomic and Molecular Physics and Optics law.invention Interferometry Wavelength Optics law Profilometer business Diode
Zdroj:	Optical Review. 21:410-414
ISSN:	1349-9432 1340-6000
DOI:	10.1007/s10043-014-0064-3
Popis:	A phase-shifting interferometer with a tunable external-cavity laser diode has been constructed for forming three-dimensional (3-D) phase profiles. The interference phase is shifted equally in four steps by varying the source wavelength. Profilometry is achieved by measuring the phase shifts that are extracted by the Carre algorithm. The linear regression of the distance measurement from 40 μm to 13mm has been experimentally demonstrated by phase-shifting interferometry. A laser-diode interferometer has been applied to 3-D profile measurement for a step-mirror object at a deep depth.
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::1693f3641b7a8bf5de84153039786b91 https://doi.org/10.1007/s10043-014-0064-3 Zobrazit plný text záznamu Full text from SpringerLink