Light-emitting nano-porous silicon structures fabricated using a plasma hydrogenation technique

Autor:	Ezatollah Arzi, Michael Robertson, Jaber Derakhshandeh, F. Karbassian, Henry H. Radamson, S. Mohajerzadeh, Yaser Abdi, Pouya Hashemi, Fatemeh Dehghan Nayeri
Rok vydání:	2005
Předmět:	inorganic chemicals Amorphous silicon Photoluminescence Materials science Silicon Annealing (metallurgy) Mechanical Engineering technology industry and agriculture Nanocrystalline silicon Analytical chemistry chemistry.chemical_element equipment and supplies Condensed Matter Physics Porous silicon complex mixtures Nano porous Monocrystalline silicon stomatognathic diseases chemistry.chemical_compound chemistry Chemical engineering Mechanics of Materials General Materials Science
Zdroj:	Materials Science and Engineering: B. :483-487
ISSN:	0921-5107
DOI:	10.1016/j.mseb.2005.08.090
Popis:	The preparation of porous silicon films by DC-plasma hydrogenation and subsequent annealing of amorphous silicon films on silicon and glass substrates is reported for the first time. The effects of ...
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::166bfc3b78244043e91731650e8ab133 https://doi.org/10.1016/j.mseb.2005.08.090 Zobrazit plný text záznamu Full Text from ScienceDirect