Commercially developed mixed-signal CMOS process features for application in advanced ROICs in 0.18μm technology node
| Autor: | Hurwitz Paul D, David Howard, Yasir Qamar, Arjun Kar-Roy, Richard Mann, M. Racanelli, S. Chaudhry, Robert L. Zwingman |
|---|---|
| Rok vydání: | 2012 |
| Předmět: |
business.industry
Computer science Electrical engineering Charge density Mixed-signal integrated circuit Integrated circuit Capacitance Noise (electronics) law.invention Threshold voltage Capacitor CMOS law Embedded system Hardware_INTEGRATEDCIRCUITS Flicker noise Field-effect transistor business Cmos process |
| Zdroj: | SPIE Proceedings. |
| ISSN: | 0277-786X |
| Popis: | Increasingly complex specifications for next-generation focal plane arrays (FPAs) require smaller pixels, larger array sizes, reduced power consumption and lower cost. We have previously reported on the favorable features available in the commercially available TowerJazz CA18 0.18mm mixed-signal CMOS technology platform for advanced read-out integrated circuit (ROIC) applications. In his paper, new devices in development for commercial purposes and which may have applications in advanced ROICs are reported. First, results of buried-channel 3.3V field effect transistors (FETs) are detailed. The buried-channel pFETs show flicker (1/f) noise reductions of ~5X in comparison to surface-channel pFETs along with a significant reduction of the body constant parameter. The buried-channel nFETs show ~2X reduction of 1/f noise versus surface-channel nFETs. Additional reduced threshold voltage nFETs and pFETs are also described. Second, a high-density capacitor solution with a four-stacked linear (metal-insulator-metal) MIM capacitor having capacitance density of 8fF/mm2 is reported. Additional stacking with MOS capacitor in a 5V tolerant process results in g50fC/mm2 charge density. Finally, one-time programmable (OTP) and multi-time programmable (MTP) non-volatile memory options in the CA18 technology platform are outlined.© (2012) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only. |
| Databáze: | OpenAIRE |
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