Vacuum Diagnosis and Testing of a Dirty Thermal Vacuum Chamber
| Autor: | Jong Yeon Lim, Yongho Yoo, Taeil Chung, Sangbaek Kang, Hyu-Soung Shin |
|---|---|
| Rok vydání: | 2018 |
| Předmět: |
010302 applied physics
Materials science Residual gas analyzer Materials Science (miscellaneous) Nuclear engineering 02 engineering and technology General Medicine 021001 nanoscience & nanotechnology Condensed Matter Physics 01 natural sciences Thermal vacuum chamber 0103 physical sciences Leak detection Electrical and Electronic Engineering Physical and Theoretical Chemistry 0210 nano-technology Pressure buildup |
| Zdroj: | Applied Science and Convergence Technology. 27:120-125 |
| ISSN: | 2288-6559 |
| DOI: | 10.5757/asct.2018.27.6.120 |
| Databáze: | OpenAIRE |
| Externí odkaz: |
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