Pristine ZnO and SnO2 films for sensing of volatile organic compounds
| Autor: | Ashok Kumar Sharma, Vinay Goyal, Jitendra Bhargava, Ajay Agarwal, Rahul Prajesh |
|---|---|
| Rok vydání: | 2016 |
| Předmět: |
Materials science
010401 analytical chemistry Analytical chemistry 02 engineering and technology 021001 nanoscience & nanotechnology Condensed Matter Physics 01 natural sciences 0104 chemical sciences Electronic Optical and Magnetic Materials Propanol chemistry.chemical_compound Health problems chemistry Operating temperature Hardware and Architecture Interdigitated electrode Electrical and Electronic Engineering 0210 nano-technology Benzene |
| Zdroj: | Microsystem Technologies. 23:3027-3031 |
| ISSN: | 1432-1858 0946-7076 |
| DOI: | 10.1007/s00542-016-3042-9 |
| Popis: | Volatile organic compounds can cause severe health problems if inhaled in concentrations more than the permissible threshold. This paper presents the experimental sensing study of three different volatile organic compounds (VOCs) viz. ethanol (C2H5OH), propanol (C3H7OH) and benzene (C6H6). Sensing experiments are performed on undoped, reactively sputtered films (ZnO/SnO2) integrated with micro-heater and interdigitated electrodes. Process integration is carried out using standard MEMS unit processes. A comprehensive experimental study is carried out to analyze the operating temperature and sensing behavior of the above mentioned volatile organic compounds on SnO2 and ZnO sensing films. The operating temperature is optimized for maximum sensitivity. Fast response ( |
| Databáze: | OpenAIRE |
| Externí odkaz: |
|
Full text from SpringerLink