| Autor: |
Nobuhiko P. Kobayashi, David M. Fryauf, Brian Giraldo, Brandon Cheney, Jacob H. Sands |
| Rok vydání: |
2020 |
| Předmět: |
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| Zdroj: |
Low-Dimensional Materials and Devices 2020. |
| DOI: |
10.1117/12.2569753 |
| Popis: |
Depositing thin films is often limited to a specific deposition process by which precursors are transported and reacted in a deposition environment. In other words, a deposition environment in which two deposition processes are unified should offer a new perception of devising a thin film structure, which galvanizes our combining atomic layer deposition (ALD) and magnetron sputtering (SPU) in a single chamber – sputtering atomic layer augmented deposition (SALAD). The SALAD system offers advantages of both ALD capable of delivering precursor precisely and accurately and SPU versatile in choosing chemical elements. In this paper, the SALAD system is employed to deposit nanocomposites consisting of multiple pairs of an aluminum oxide thin film deposited by ALD and a copper thin film deposited by SPU. Optical properties collected from the nanocomposites show distinctive dispersion features to which the effective medium approximation does not seem to simply apply. |
| Databáze: |
OpenAIRE |
| Externí odkaz: |
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