A Novel Body-Tied Silicon-On-Insulator(SOI) n-channel Metal-Oxide-Semiconductor Field-Effect Transistor with Grounded Body Electrode

Autor: Hyung Joun Yoo, Won-Gu Kang Kang, Jong-Son Lyu
Rok vydání: 1996
Předmět:
Zdroj: ETRI Journal. 17:1-12
ISSN: 1225-6463
DOI: 10.4218/etrij.96.0196.0041
Popis: A novel body-tied silicon-on-insulator(SOI) n-channel metal-oxide-semiconductor field-effect transistor with grounded body electrode named GBSOI nMOSFET has been developed by wafer bonding and etch-back technology. It has no floating body effect such as kink phenomena on the drain current curves, single-transistor latch and drain current overshoot inherent in a normal SOI device with floating body. We have characterized the interface trap density, kink phenomena on the drain current () curves, substrate resistance effect on the curves, subthreshold current characteristics and single transistor latch of these transistors. We have confirmed that the GBSOI structure is suitable for high-speed and low-voltage VLSI circuits.
Databáze: OpenAIRE