Testing and measurement of microlenses

Autor: Wesley P. Townsend, Keith O. Mersereau, Casimir R. Nijander, Michael C. Hutley, Daniel J. Daly, Randall J. Crisci
Rok vydání: 1993
Předmět:
Zdroj: SPIE Proceedings.
ISSN: 0277-786X
Popis: Microlenses and microlens arrays present challenging measurement problems to manufacturer and user alike. Standard techniques designed for testing larger optical components are impractical for lenses with dimensions of only a few hundred micrometers. We present several methods for characterizing the wavefront, focal length, surface profile, and other parameters of microlenses and microlens arrays. The use of Mach-Zehnder and Twyman-Green interferometers for wavefront and focal length measurement are discussed in some detail.
Databáze: OpenAIRE