Autor: |
Yun-San Chien, Huay-Chung Liou, Wei-En Fu, Chung-Lin Wu, Bo-Ching He |
Rok vydání: |
2015 |
Předmět: |
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Zdroj: |
Thin Solid Films. 584:372-377 |
ISSN: |
0040-6090 |
DOI: |
10.1016/j.tsf.2015.01.019 |
Popis: |
This study identifies a procedure for the calibration of the Z-magnification of an atomic force microscope below 10 nm by single-atom steps and gives an uncertainty evaluation. A Si(111) surface with periodically arranged single-atom steps was used as a standard reference. The lattice constant of the Si(111) is 0.312 nm, which is traced to SI units through X-ray diffraction. The 33 layers of continuous stacked single-atom steps were scanned and step heights ranging from 0.3 nm to 10 nm were measured and analyzed. The influential factors of calibration for the Z-magnification of an atomic force microscope were identified to estimate the uncertainty according to ISO/IEC Guide 98-3:2008. The relative expanded uncertainties ranged from 4.7% to 5.9%. |
Databáze: |
OpenAIRE |
Externí odkaz: |
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