Continuous multi cycle nanoindentation studies on compositionally graded Ti1−xAlxN multilayer thin films
| Autor: | Feby Jose, R. Ramaseshan, A.K. Tyagi, Baldev Raj, Sitaram Dash, A.K. Balamurugan |
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| Rok vydání: | 2011 |
| Předmět: |
Materials science
Scanning electron microscope Mechanical Engineering Analytical chemistry chemistry.chemical_element Substrate (electronics) Nanoindentation Condensed Matter Physics Secondary ion mass spectrometry chemistry Mechanics of Materials Indentation General Materials Science Thin film Tin Layer (electronics) |
| Zdroj: | Materials Science and Engineering: A. 528:6438-6444 |
| ISSN: | 0921-5093 |
| DOI: | 10.1016/j.msea.2011.04.068 |
| Popis: | Two types of Compositionally Graded Multilayer (CGM) films of Ti 1− x Al x N consisting of 21 layers were synthesized by reactive magnetron co-sputtering technique. The first one begins with a layer of Ti 0.4 Al 0.6 N from substrate and ends with TiN, whereas exactly a reverse order has been followed in the second one. As deposited CGM films are poly-crystalline with rocksalt structure similar to stoichiometric TiN. Secondary Ion Mass Spectrometry (SIMS) depth profile of the films showed the presence of 21 layers of equal thickness (50 nm) with varying aluminum content in steps. Continuous Multi Cycle (CMC) nanoindentation technique was used to analyze the failure modes of these films. Topographic examination of the indented zone revealed the presence of edge cracks inside and outside the indentation area when the load exceeds beyond 90 mN. The load–displacement profiles of CMC and single indentations exhibited the onset of pop-ins at a depth of ∼200 nm. |
| Databáze: | OpenAIRE |
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