A multi-sensor biological monitoring module built up in LTCC-technology
| Autor: | Gottfried Köhler, G. Stangl, Bruno Balluch, Walter Smetana, Erwin Gaubitzer, Michael Edetsberger |
|---|---|
| Rok vydání: | 2007 |
| Předmět: |
business.industry
Computer science Circuit design Microfluidics Electrical engineering Condensed Matter Physics Atomic and Molecular Physics and Optics Surfaces Coatings and Films Electronic Optical and Magnetic Materials Surface micromachining Reliability (semiconductor) visual_art visual_art.visual_art_medium Thick film technology Ceramic Electrical and Electronic Engineering business Realization (systems) Electronic circuit |
| Zdroj: | Microelectronic Engineering. 84:1240-1243 |
| ISSN: | 0167-9317 |
| DOI: | 10.1016/j.mee.2007.01.155 |
| Popis: | Low temperature co-fired ceramic (LTCC) technology was originally developed for the realization of multilayer circuits of high reliability. It was recognized that LTCC-technology is a valuable development in thick film technology which launches new application areas as it becomes evident that complex three-dimensional structures can be easily realized. Aspects of the realization of a sophisticated biological monitoring module comprising a three-dimensional network of channels and cavities is demonstrated. |
| Databáze: | OpenAIRE |
| Externí odkaz: |
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