Correlative Defect Characterization in Semiconductors via Electron Channeling Contrast Imaging and Scanning Deep Level Transient Spectroscopy
| Autor: | Julia I. Deitz, Santino D. Carnevale, D. A. Gleason, Aaron R. Arehart, Tyler J. Grassman, Z. Zhang, S.A. Ringel, K. Galiano, Jonathan P. Pelz |
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| Rok vydání: | 2018 |
| Předmět: |
010302 applied physics
Correlative Materials science Deep-level transient spectroscopy business.industry 02 engineering and technology Electron 021001 nanoscience & nanotechnology Contrast imaging 01 natural sciences Characterization (materials science) Nuclear magnetic resonance Semiconductor 0103 physical sciences 0210 nano-technology business Instrumentation |
| Zdroj: | Microscopy and Microanalysis. 24:1056-1057 |
| ISSN: | 1435-8115 1431-9276 |
| DOI: | 10.1017/s1431927618005767 |
| Databáze: | OpenAIRE |
| Externí odkaz: |
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