Simultaneously Enhancing Internal and Extraction Efficiencies of GaN-based Light Emitting Diodes Via Chemical-Wet-Etching Patterned-Sapphire-Substrate (CWE-PSS)
Autor: | Shawn-Yu Lin, Kar Wai Ng, Y. J. Lee, Shing-Chung Wang, Allan S. P. Chang, Hao-Chung Kuo, Zu-Po Yang, Kei May Lau, Tien-Chang Lu, C. H. Chiu |
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Rok vydání: | 2007 |
Předmět: | |
Zdroj: | ECS Transactions. 11:225-230 |
ISSN: | 1938-6737 1938-5862 |
DOI: | 10.1149/1.2783876 |
Popis: | We report a chemical-wet-etching patterned-sapphire-substrate (CWE-PSS) that simultaneously enhances internal quantum efficiency and light extraction efficiency of gallium nitride based light-emitting-diode (LED). According to transmission electron microscopy (TEM) images, the threading dislocations penetrating into active region was dramatically reduced in the CWE-PSS structure compared to the planar sapphire substrate, i.e. enhancement of internal quantum efficiency. And according to the measurement of angular dependent diffraction power, CWE-PSS also serves as a diffraction grating which diffracts guided light into escaping cones, further improving light extraction efficiency of LED device. |
Databáze: | OpenAIRE |
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