A new approach for producing of film structures based on Si1-xGex

Autor:	I.M. Gavrilin, N.L. Grevtsov, A.V. Pavlikov, A.A. Dronov, E.B. Chubenko, V.P. Bondarenko, S.A. Gavrilov
Rok vydání:	2022
Předmět:	Mechanics of Materials Mechanical Engineering General Materials Science Condensed Matter Physics
Zdroj:	Materials Letters. 313:131802
ISSN:	0167-577X
DOI:	10.1016/j.matlet.2022.131802
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::147e6f7beac5619c159fb9403976fca1 https://doi.org/10.1016/j.matlet.2022.131802 Zobrazit plný text záznamu Full Text from ScienceDirect