Silicon field emission electron beam sources

Autor:	R. True, William T. Joines, D. Temple, D. Palmer, J. Mancusi, D. Vellenga, C.A. Ball, G.E. McGuire, L. Yadon, J. Shaw, T. Hargreaves, R. Symons, H.F. Gray
Rok vydání:	1995
Předmět:	Field electron emission Materials science Silicon chemistry business.industry Fabrication methods technology industry and agriculture Cathode ray Optoelectronics chemistry.chemical_element Atomic physics business Characterization (materials science)
Zdroj:	International Conference on Plasma Science (papers in summary form only received).
DOI:	10.1109/plasma.1995.533527
Popis:	Summary form only given. This presentation will describe several fabrication methods developed at MCNC for silicon column emitters. Micrographs of the completed structures and arrays will be included. In addition, equipment and methods for electrical characterization of these arrays will be described, and the latest test results will be shown.
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::1461a2a4538fcb87cd5069d98377d6be https://doi.org/10.1109/plasma.1995.533527 Zobrazit plný text záznamu