Automatic ellipsometry without a phase plate
| Autor: | I W Salter, P H Lissberger, P L Taylor, M Fitzpatrick |
|---|---|
| Rok vydání: | 1977 |
| Předmět: |
Birefringence
Materials science business.industry General Engineering General Physics and Astronomy law.invention Phase plate symbols.namesake Optics Reliability (semiconductor) Ellipsometry Modulation law Faraday effect symbols General Materials Science Thin film business Faraday cage Instrumentation |
| Zdroj: | Journal of Physics E: Scientific Instruments. 10:635-641 |
| ISSN: | 0022-3735 |
| DOI: | 10.1088/0022-3735/10/6/019 |
| Popis: | The design and operation of a sensitive self-nulling automatic ellipsometer based on the application of Faraday effect modulation are described. A number of desirable features of previously reported instruments are combined in the design. In particular, the use of a phase plate is obviated; and strain birefringence is minimized by the use of benzene in the Faraday cells. Various sources of systematic error are considered and measurements on thin films of gold to test the reliability of the instrument are discussed. |
| Databáze: | OpenAIRE |
| Externí odkaz: |
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