Calculation of electrostatic forces and torques in MEMS using path-independent integrals
| Autor: | N. C. Tien, J.-L.A. Yeh, Chung-Yuen Hui |
|---|---|
| Rok vydání: | 2000 |
| Předmět: |
Physics
Surface (mathematics) Interdigital transducer Mechanical Engineering Charge (physics) Maxwell stress tensor Invariant (physics) Electronic Optical and Magnetic Materials Connection (mathematics) Classical mechanics Mechanics of Materials Path integral formulation Torque Electrical and Electronic Engineering |
| Zdroj: | Journal of Micromechanics and Microengineering. 10:477-482 |
| ISSN: | 1361-6439 0960-1317 |
| DOI: | 10.1088/0960-1317/10/3/325 |
| Popis: | Surface- or path-independent integrals based on the Maxwell stress tensor can be used to compute the forces and torques on micromachined electrostatic devices. The connection of these integrals with charge concentration near the edge of thin plate-like devices (combdrives) is discussed. To illustrate the use of these path-independent integrals, the force acting on a periodic array of asymmetric combdrives is evaluated. |
| Databáze: | OpenAIRE |
| Externí odkaz: |
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