| Popis: |
Current high-resolution X-ray microscopy offers an informative view on the internal microstructure of small devices, allowing the observer to obtain a number of conclusions on the status and internal properties of the sample. However, due to the nature of the resulting two-dimensional images, this technique will give ambiguous information if the three-dimensional structure of the micro assembly is complex. During the past several years, computed tomography has progressed to higher picture resolution and quicker reconstruction of the 3D-volume. More recently it has allowed for a three-dimensional look into the inside of materials with submicron resolution. |
