Fundamental studies of interactions between polymer substrate and precursor in sequential infiltration synthesis
| Autor: | Francis J. McCallum, Jiacheng Zhao, Daloar Hossain, Joshua A. Kaitz, James F. Cameron, Peter Trefona, Idriss Blakey, Hui Peng, Andrew K. Whittaker |
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| Rok vydání: | 2023 |
| Zdroj: | Advances in Patterning Materials and Processes XL. |
| DOI: | 10.1117/12.2655986 |
| Databáze: | OpenAIRE |
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