Study of the properties of the asymmetric microwave low pressure gas discharge
| Autor: | E. P. Zinina, Sergey Gestrin, Vladimir I. Martynov, Marina Brovkova, Boris Brzhozovskii |
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| Rok vydání: | 2019 |
| Předmět: |
0209 industrial biotechnology
Materials science Acoustics and Ultrasonics 02 engineering and technology Electron Plasma Inelastic scattering 021001 nanoscience & nanotechnology Condensed Matter Physics Surfaces Coatings and Films Electronic Optical and Magnetic Materials Electric discharge in gases Resonator 020901 industrial engineering & automation Diffusion process Excited state Atomic physics 0210 nano-technology Microwave |
| Zdroj: | Journal of Physics D: Applied Physics. 52:485202 |
| ISSN: | 1361-6463 0022-3727 |
| DOI: | 10.1088/1361-6463/ab3ea7 |
| Popis: | The properties of an asymmetric microwave gas discharge that occurs in an argon-filled resonator chamber of a processing plant near the surface of a metal product during the formation on it of a composite structure are experimentally and theoretically investigated. It is shown that with a significant difference between the elec-trode dimensions, the smaller of which is the product, and the larger are the resonator chamber walls, there is an area of a high energy density of the microwave field near the surface of the product, in which electrons are accelerated to high energies up to hundreds of eV. Diffusing from this area, high-energy electrons are decelerated due to inelastic scattering on the gas molecules that fill the resonator chamber, ionizing them or promoting them to an excited state. We have obtained a differential equation and found its solution which describes the diffusion process accompanied by the loss of energy by high-energy electrons, within the framework of the continuous deceleration model. The estimates of the main physical parameters characterizing the microwave gas discharge plasma are found. The conditions that are most favorable for the energy transfer from the microwave field to the plasma electron subsystem and the product surface treatment are determined. |
| Databáze: | OpenAIRE |
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