Structure of epitaxial Gd2O3 films and their registry on GaAs(100) substrates

Autor: Ahmet Refik Kortan, B. Bolliger, J. Kwo, Minghwei Hong, Joseph Petrus Mannaerts, Mehmet Erbudak
Rok vydání: 2000
Předmět:
Zdroj: Surface and Interface Analysis. 30:514-517
ISSN: 1096-9918
0142-2421
DOI: 10.1002/1096-9918(200008)30:1<514::aid-sia760>3.0.co;2-k
Popis: The structure and alignment of epitaxial molecular-beam-epitaxy-grown single-crystal Gd2O3 films on GaAs(100) are studied using secondary electron imaging. We have found that the 115 A thick Gd2O3 film has a cubic structure. The [110] axis is aligned perfectly with the surface normal of the substrate. The secondary electron patterns are recorded during sequential sputtering with 1000 eV Ne+ ions. They show that the [001] and [110] directions of the film overlap with the [011] and [011] directions of the substrate with a high degree of site registry of atoms at the interface. Copyright © 2000 John Wiley & Sons, Ltd.
Databáze: OpenAIRE