Two-step simulation method for automatic material handling system of semiconductor fab
Autor: | Sang Hoon Kong |
---|---|
Rok vydání: | 2007 |
Předmět: |
Engineering
business.industry General Mathematics Two step computer.software_genre Industrial and Manufacturing Engineering Computer Science Applications Simulation software Semiconductor fab Control and Systems Engineering Electronics Process engineering business Throughput (business) computer Material handling Software Simulation |
Zdroj: | Robotics and Computer-Integrated Manufacturing. 23:409-420 |
ISSN: | 0736-5845 |
DOI: | 10.1016/j.rcim.2006.05.004 |
Popis: | To design an effective automated material handling system (AMHS) in semiconductor fab, Samsung Electronics has used the commercial AMHS simulation software. Although this tool is very efficient at simulating material handling system, an additional simulation step is required to apply the production logic to the AMHS simulation model. Therefore, this paper introduces one more simulation step, namely the production simulation step. In the production simulation step, the production logic is implemented and the throughput of the semiconductor line can be predicted. The AMHS simulation step follows the production simulation step. In the AMHS simulation step, the capability of AMHS is predicted in advance, based on which the scope of investment can be estimated. |
Databáze: | OpenAIRE |
Externí odkaz: |