Complementary Two-Dimensional (2-D) FET Technology With MoS2/hBN/Graphene Stack

Autor: Zichao Ma, Cristine Jin Estrada, Mansun Chan
Rok vydání: 2021
Předmět:
Zdroj: IEEE Electron Device Letters. 42:1890-1893
ISSN: 1558-0563
0741-3106
DOI: 10.1109/led.2021.3124823
Popis: This paper demonstrates a complementary 2-D field-effect transistor (FET) technology with molybdenum disulfide (MoS2) as the active film, hexagonal boron nitride (hBN) as the gate dielectric, and graphene as the gate electrode. The active region of the n-channel (n-FET) and p-channel (p-FET) devices are formed by undoped and Nb-doped MoS2, respectively. The complementary FETs have the desirable threshold voltage polarity, similar current drive, and high on-off current ratios of more than 106. A complementary metal-oxidesemiconductor (CMOS) inverter has been fabricated and the measured gain is about 14 with 90% noise margin at a 2 V power supply.
Databáze: OpenAIRE