Non-linear FEM simulation of the elasto-plastic behaviour in MEMS specimens
| Autor: | Soma Aurelio, Armando Matteo, Margesin Benno |
|---|---|
| Rok vydání: | 2018 |
| Předmět: |
Microelectromechanical systems
Materials science business.industry Elasto plastic Experimental data 02 engineering and technology Structural engineering 021001 nanoscience & nanotechnology GeneralLiterature_MISCELLANEOUS Finite element method Computer Science::Other 020303 mechanical engineering & transports 0203 mechanical engineering Non linear fem Residual stress 0210 nano-technology business |
| Zdroj: | 2018 Symposium on Design, Test, Integration & Packaging of MEMS and MOEMS (DTIP). |
| DOI: | 10.1109/dtip.2018.8394185 |
| Popis: | Main goal of the present paper is the experimental characterization of the elastic-plastic behavior of beam structure MEMS test specimen. For this purpose, a non-linear FE-based model is studied and results were successively benchmarked with experimental data obtained in laboratory. In this paper non-linear FEM simulation is uses to design and characterize a specimen embedded in the test MEMS structure. |
| Databáze: | OpenAIRE |
| Externí odkaz: |
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