Phase-Measuring Interferometry: Applications And Techniques
Autor: | H.Philip Stahl, Jay A. Tome |
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Rok vydání: | 1989 |
Předmět: | |
Zdroj: | SPIE Proceedings. |
ISSN: | 0277-786X |
DOI: | 10.1117/12.947575 |
Popis: | A review of the current state of phase-measuring interferometry is presented. Emphasis is placed on the broadening field of applications for the technique including; micro-surface topology, non-destructive testing, and surface contouring. Advance techniques of extending the range of phase-measuring interferometry and high speed data sampling are presented, along with two other techniques of interest. |
Databáze: | OpenAIRE |
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