Phase-Measuring Interferometry: Applications And Techniques

Autor: H.Philip Stahl, Jay A. Tome
Rok vydání: 1989
Předmět:
Zdroj: SPIE Proceedings.
ISSN: 0277-786X
DOI: 10.1117/12.947575
Popis: A review of the current state of phase-measuring interferometry is presented. Emphasis is placed on the broadening field of applications for the technique including; micro-surface topology, non-destructive testing, and surface contouring. Advance techniques of extending the range of phase-measuring interferometry and high speed data sampling are presented, along with two other techniques of interest.
Databáze: OpenAIRE