Initial Nucleation Study and New Technique for Sublimation Growth of AlN on SiC Substrate

Autor: Bin Liu, Ying Shi, Jharna Chaudhuri, J. Chaudhuri, James H. Edgar, L. Liu, John G Swadener, Harry M. Meyer, E. A. Payzant, Larry R Walker, N. D. Evans
Rok vydání: 2001
Předmět:
Zdroj: physica status solidi (a). 188:757-762
ISSN: 1521-396X
0031-8965
Popis: Single crystal platelets of AlN were successfully grown on 6H-SiC(0001) by a novel technique designed to suppress SiC decomposition, promote two-dimensional growth, and eliminate cracking in the AlN. X-ray diffractometry and synchrotron white beam X-ray topography demonstrate that the final AlN single crystal is of high structural quality.
Databáze: OpenAIRE