A Closed-Form Transient Joule Heating Model for an Interconnect in an Integrated Circuit

Autor: Woojin Ahn, Patrick Justison, Tian Shen, Haojun Zhang, Muhammad A. Alam
Rok vydání: 2020
Předmět:
Zdroj: IEEE Electron Device Letters. 41:288-291
ISSN: 1558-0563
0741-3106
DOI: 10.1109/led.2019.2960060
Popis: Front and back ends of line (FEOL and BEOL) self-heating and mutual heating are important barriers to a sustained increase in processor speed and density. In this context, the severity of transient Joule heating in scaled interconnects under a variety of operating conditions (e.g., frequency and duty cycle) is not fully understood. Here we introduce the closed-form analytical transient Joule heating model to calculate the time-dependent temperature rise of an interconnect ( $\Delta {T}_{\textsf {Int}}({t})$ ) located at an arbitrary metal level within an integrated circuit (IC). The model is validated by high-fidelity finite element method simulations and specially designed test structures. Remarkably, the model predicts ${I}_{\textsf {Max}}$ (the interconnect-specific current for a certain degree of $\Delta {T}_{\textsf {Int}}$ ) within 20%–25% for an arbitrary duty cycle. Therefore, our model can be used to accurately predict temperature-accelerated interconnect reliability issues of a modern IC.
Databáze: OpenAIRE