Topology optimization using multistep mapping from 2D photomask to 3D structure for designing reinforcing rib
| Autor: | Keiichi Shimaoka, Norio Fujitsuka, Tsuyoshi Nomura, Teruhisa Akashi, Takashi Ozaki |
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| Rok vydání: | 2014 |
| Předmět: |
Microelectromechanical systems
Materials science business.industry Topology optimization Metals and Alloys Structure (category theory) Initial topology Structural engineering Deformation (meteorology) Condensed Matter Physics Surfaces Coatings and Films Electronic Optical and Magnetic Materials Surface micromachining Residual stress Electrical and Electronic Engineering Photomask business Instrumentation |
| Zdroj: | Sensors and Actuators A: Physical. 215:130-135 |
| ISSN: | 0924-4247 |
| DOI: | 10.1016/j.sna.2013.08.033 |
| Popis: | We developed a topology optimization method for designing a two-dimensional (2D) photomask. The optimization employs multistep mapping compatible with micromachining processes to improve the characteristics of a three-dimensional (3D) MEMS fabricated by the photomask. We used this method in the development of an electrostatic micromirror to design the most effective reinforcing rib shape that reduces the deformation caused by internal residual stress. Employing a dot-array pattern as the initial topology, the optimization calculation converged after 300 iterations for predicted 79.1% reductions in maximum displacement. To verify this result, micromirror structures were fabricated and their deformations were experimentally measured. The experimental deformations were reduced by 87.1%. The calculated results agree well with the experimental results and demonstrate the effectiveness of the proposed method. |
| Databáze: | OpenAIRE |
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