Full/partial depletion effects in FinFETs

Autor: R.J. Zaman, C.R. Cleavelin, Ken Matthews, M. Gostkowski, Jean-Pierre Colinge, Shaofeng Yu, Tsu-Jae King, P. Patruno, C. Maleville, M. F. Pas, Weize Xiong, Rick L. Wise
Rok vydání: 2005
Předmět:
Zdroj: 2004 IEEE International SOI Conference (IEEE Cat. No.04CH37573).
DOI: 10.1109/soi.2004.1391613
Popis: Full/partial depletion effects are observed in n-channel FinFETs. Gate-induced floating body effect and degraded subthreshold slope are observed in partially depleted devices but not in fully depleted devices. Floating-body effects are observed in FD devices with applied negative back-gate bias.
Databáze: OpenAIRE