In situ observation of nitridation of GaAs (001) surfaces by infrared reflectance spectroscopy

Autor: Yoshiharu Yamauchi, Kunihiko Uwai, Naoki Kobayashi
Rok vydání: 1996
Předmět:
Zdroj: Applied Surface Science. :412-416
ISSN: 0169-4332
DOI: 10.1016/0169-4332(96)00310-8
Popis: Nitridation of GaAs (001) surfaces grown by molecular beam epitaxy is observed by detecting the surface reflectance change caused by the formation of Ga-N and As-N bonds. Nitridation is performed by exposing (4 × 2) or (2 × 4) surfaces to atomic nitrogen generated with a heated tungsten filament in an As-free environment. Nitridation of the Ga-rich (4 × 2) surface results in a single reflectance peak at 1200 cm −1 attributed to the formation of Ga-N bonds, while nitridation of the As-rich (2 × 4) surface results in another peak at 1000 cm −1 attributed to As-N bonds in addition to the Ga-N peak.
Databáze: OpenAIRE