Effect of oxygen pressure on the orientation of films deposited on (102) Al2O3 substrates
| Autor: | Kul B. Bhasin, Carl H. Mueller, Paul H. Holloway, Felix A. Miranda |
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| Rok vydání: | 1994 |
| Předmět: |
Aluminium oxides
Materials science Metals and Alloys Analytical chemistry Mineralogy Corundum Surfaces and Interfaces engineering.material Epitaxy Titanate Surfaces Coatings and Films Electronic Optical and Magnetic Materials chemistry.chemical_compound chemistry Materials Chemistry Strontium titanate engineering Sapphire Texture (crystalline) Thin film |
| Zdroj: | Thin Solid Films. 238:123-126 |
| ISSN: | 0040-6090 |
| Popis: | The oxygen pressure PO2 during growth of strontium titanate (SrTiO3) films on single crystals of (1 1 02) oriented sapphire (Al2O3) substrates significantly influenced the film orientations. The films were deposited using a pulsed laser (248 nm) deposition process in which the SrTiO3 films were deposited at a PO2 of either 40 or 200 mTorr, and the YBa2Cu3O7−x (YBCO) films were always deposited at 200 mTorr of oxygen. We found that growth at 40 mTorr induced the (110) SrTiO3 orientation to predominate, while increasing the PO2 to 200 mTorr favored the (100) orientation. YBCO films deposited on these barrier layers were (013) and (001) oriented respectively; these were the orientations that minimized lattice mismatch at the YBCO/SrTiO3 interface. |
| Databáze: | OpenAIRE |
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