Effect of power density on compositional and structural evolution of ITO thin film by HiPIMS method
| Autor: | Ming-Jie Zhao, Jin-Fa Zhang, Jie Huang, Qi-Hui Huang, Wan-Yu Wu, Ming-Chun Tseng, Chien-Jung Huang, Hao-Chung Kuo, Shui-Yang Lien, Wen-Zhang Zhu |
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| Rok vydání: | 2022 |
| Předmět: | |
| Zdroj: | Vacuum. 200:111034 |
| ISSN: | 0042-207X |
| DOI: | 10.1016/j.vacuum.2022.111034 |
| Databáze: | OpenAIRE |
| Externí odkaz: |
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