Survivability of MEMS Packages at High-G Loads

Autor:	Ryszard J. Pryputniewicz
Rok vydání:	2014
Předmět:	Microelectromechanical systems Computer science Orders of magnitude (temperature) Mechanical Engineering Survivability Gyroscope Automotive engineering Die (integrated circuit) law.invention Units of measurement Test article law Sensitivity (control systems) Electrical and Electronic Engineering Instrumentation
Zdroj:	International Journal of Optomechatronics. 8:391-399
ISSN:	1559-9620 1559-9612
DOI:	10.1080/15599612.2014.972600
Popis:	Military grade MEMS gyroscopes are critical for navigation in guided munitions. In such applications the sensor must survive extremely harsh launch environments and maintain integrity, often requiring sensitivity to loads many orders of magnitude lower than those experienced during launch. Previous inertial measurement units (IMUs) have proven to remain functional at loads up to 20,000 g’s [1]. In other work, gyroscopes (as well as other MEMS) have proven to survive loading up to 60,000 g’s [2]. In these previous works, performance was examined exclusively by electrical means. The current study aims to monitor the mechanical effects that such loading will have on the die and structure through interferometric shape measurement of the sensors.
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::11647b24ac0fab492efca6703c4cf115 https://doi.org/10.1080/15599612.2014.972600 Zobrazit plný text záznamu Plný text ve formátu PDF Plný text ve formátu HTML
Nepřihlášeným uživatelům se plný text nezobrazuje	K zobrazení výsledku je třeba se přihlásit.