A tetrahedral three-facet micro mirror with the inclined deep X-ray process
| Autor: | Dong Kwan Jung, Suk Sang Chang, Kyehwan Gil, Noh Yeol Park, Dong-Young Oh, Seung S. Lee |
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| Rok vydání: | 2001 |
| Předmět: |
Fabrication
Materials science business.industry Metals and Alloys Plane mirror Condensed Matter Physics Equilateral triangle Surfaces Coatings and Films Electronic Optical and Magnetic Materials Optics Tetrahedron Surface roughness X-ray lithography Electrical and Electronic Engineering business LIGA Instrumentation Lithography |
| Zdroj: | Sensors and Actuators A: Physical. 93:157-161 |
| ISSN: | 0924-4247 |
| Popis: | We present an oblique microstructure, a tetrahedral three-facet micro mirror, and its fabrication process with the inclined deep X-ray lithography (DXRL). The mirror has an equilateral triangular base of 100 μm length and mirror-like three side-facets inclined to the base at 45° with knife edges. When two equilateral triangle patterns of gold absorber in the X-ray mask shade the PMMA (polymethylmethacrylate) substrate with two times of inclined DXRL at angles of 45° and tan−1(2)°, the shaded part of PMMA produces a tetrahedral three-facet mirror. The process has been conducted with “a” X-ray mask without any alignments that may degrade the precision of microstructures. The completed tetrahedral mirror shows excellent aspects of mirror-like facets and knife-edges with a surface roughness of 20–30 nm. By changing the gap distance between the X-ray mask and the PMMA substrate, the size of the three-facet mirror can be controlled. The three-facet micro mirror is devised as a three-directional laser beam reflector for the measurement of 6 d.f. motion of the slider flying on a magnetic disk of a hard disk driver (HDD). |
| Databáze: | OpenAIRE |
| Externí odkaz: |
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