Influence of crystallization conditions on formation of dislocation structure of germanium homoepitaxial layers produced by gas-transport technique

Autor: S. I. Stenin, Yu. D. Vaulin, N. N. Migal, V. P. Migal
Rok vydání: 1973
Předmět:
Zdroj: Physica Status Solidi (a). 15:697-710
ISSN: 1521-396X
0031-8965
DOI: 10.1002/pssa.2210150242
Popis: The dislocation structure of Ge layers has been studied by X-ray topography. The configuration, type, and density of dislocation are found to depend on temperature and growth rate. It is suggested, that the mechanism of the dislocation generation is based on the interaction of the growth steps with local inhomogeneities on the surface. The peculiarities of the dislocation behaviour in the growing layers in dependencce on the deposition temperature are discussed. [Russian Text Ignored.]
Databáze: OpenAIRE