Local depth monitoring using scanning electron microscopy and its verification using atomic force microscopy
| Autor: | Inseok Park, JaeHyung Ahn, Donghyun Lee, Souk Kim, Minho Rim, Younghoon Sohn |
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| Rok vydání: | 2023 |
| Zdroj: | Metrology, Inspection, and Process Control XXXVII. |
| DOI: | 10.1117/12.2657848 |
| Databáze: | OpenAIRE |
| Externí odkaz: |
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