Thickness and density determination of ultrathin solid films comprising multilayer x‐ray mirrors by x‐ray reflection and fluorescence study

Autor:	N. N. Salaschenko, I. V. Bashelhanov, M. V. Kovalchuk, N. N. Novikova, S. I. Zheludeva, Yu. Ya. Platonov, A. D. Akhsakhalyan
Rok vydání:	1992
Předmět:	Materials science business.industry X-ray Analytical chemistry chemistry.chemical_element Fluorescence Standing wave Reflection (mathematics) Optics chemistry Thin film business Instrumentation Carbon Intensity (heat transfer)
Zdroj:	Review of Scientific Instruments. 63:1519-1522
ISSN:	1089-7623 0034-6748
DOI:	10.1063/1.1143010
Popis:	New possibilities of ultrathin film thickness and density determination are demonstrated by means of x‐ray method in the form of x‐ray standing wave technique (XSW) and total external fluorescence study (NTEF). Several samples with ultrathin Fe films protected by carbon layers and with bare Fe film on the top have been analyzed. Rh/C LSM was used as an XSW generator to determine the film’s thickness (15–40 A). Densities were evaluated by NTEF study and came out to be about 85% from that of the bulk material for covered and 45% for bare Fe films. The detailed analysis of E‐field intensity distribution over the diffracting medium is presented.
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::113ec0287b22a8d6293bba175ffeb657 https://doi.org/10.1063/1.1143010 Zobrazit plný text záznamu