Fabrication and characterizations of a monolithic PZT microstage
| Autor: | Hegen Xu, Masayoshi Esashi, Takahito Ono, De Yuan Zhang |
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| Rok vydání: | 2006 |
| Předmět: |
Engineering
Fabrication Precision engineering business.industry Laser beam machining Mechanical engineering Condensed Matter Physics Piezoelectricity Finite element method Electronic Optical and Magnetic Materials Machining Hardware and Architecture Wafer dicing Electrical and Electronic Engineering business Lithography |
| Zdroj: | Microsystem Technologies. 12:883-890 |
| ISSN: | 1432-1858 0946-7076 |
| DOI: | 10.1007/s00542-006-0206-z |
| Popis: | This paper reports on the fabrication and characterizations of a monolithic Pb(ZrTi)O3 (PZT) microstage with multi-degrees of freedom for high-precision positioning. The entire device is fabricated in a symmetrical arrangement from a PZT plate with a size of 15 × 15 × 0.8 mm3. Four actuation units with displacement amplification mechanisms are integrated in the structure. All the actuators can be driven individually which result in movements of a stage in different directions. The main fabrication steps include dicing, electroplating, lithography and laser machining. The performances of the displacement and the resonant frequencies of the microstage are simulated using a finite element method (FEM) with different dimensions. A prototype has been fabricated and evaluated. Comparisons between FEM simulation and experimental results are carried out. |
| Databáze: | OpenAIRE |
| Externí odkaz: |
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