Two-dimensional Visualization of Temperature Distribution in Molten Region of a-Si Film during Atmospheric Pressure Thermal Plasma Jet Annealing
| Autor: | H. Hanafusa, Yuri Mizukawa, A. Kameda, S. Higashi |
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| Rok vydání: | 2019 |
| Předmět: | |
| Zdroj: | Extended Abstracts of the 2019 International Conference on Solid State Devices and Materials. |
| DOI: | 10.7567/ssdm.2019.g-2-04 |
| Databáze: | OpenAIRE |
| Externí odkaz: |
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