Atomic Layer Deposition and Characterization of SiO2 Films from Noble Amino Silane and Ozone
| Autor: | Kwangseon Jin, Jae-Kyung Kim, Jinsik Kim, Jongwan Jung, Won-Jun Lee |
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| Rok vydání: | 2011 |
| Zdroj: | ECS Meeting Abstracts. :1383-1383 |
| ISSN: | 2151-2043 |
| DOI: | 10.1149/ma2011-01/22/1383 |
| Popis: | not Available. |
| Databáze: | OpenAIRE |
| Externí odkaz: |
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