Wear and Ion Erosion in Spinning Disk Fences made with Al and Torlon

Autor:	Walt Wriggins, Douglas Hicks, Michael I. Current
Rok vydání:	2018
Předmět:	Materials science Ion beam Microscopy Erosion Wafer Surface finish Fixture Composite material Spinning Ion
Zdroj:	2018 22nd International Conference on Ion Implantation Technology (IIT).
DOI:	10.1109/iit.2018.8807899
Popis:	Wear effects are evaluated in spinning wheel wafer fixture components made from Al and Torlon materials exposed to high current ion beam exposures and over 350,000 wafer moves over extended time periods. Metrologies used include: (1) optical and SEM microscopy (surface texture changes), (2) optical profilometry (wafer wear and ion erosion), (3) RBS (chemical composition and accumulated ion dose), (4) TOF-SIMS and ICPMS (elemental contamination on wafers). In addition, we present in-line data on reduced wafer chipping with Torlon replacing Al fences.
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::10953f186bfcd32d766c3761e2e11eb4 https://doi.org/10.1109/iit.2018.8807899 Zobrazit plný text záznamu