Photo-definable microchannels made with spin-on polymers and short sacrificial etch times

Autor:	Stephen M. Schultz, Aaron R. Hawkins, Brian S. Phillips, Laurie-Anne Parks, Mallory Phillips, C. Carron
Rok vydání:	2009
Předmět:	chemistry.chemical_classification Microchannel Materials science Microfluidics Nanotechnology Polymer Condensed Matter Physics Microstructure Electronic Optical and Magnetic Materials law.invention Surface micromachining chemistry law Materials Chemistry Photolithography Spin (physics) Lithography
Zdroj:	Microfluidics and Nanofluidics. 7:283-289
ISSN:	1613-4990 1613-4982
DOI:	10.1007/s10404-009-0404-y
Popis:	Hollow tubular microfluidic channels were fabricated from two spin-on, photodefinable polymers.
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::10801b3f88bd1d027273900a895c2fbc https://doi.org/10.1007/s10404-009-0404-y Zobrazit plný text záznamu Full text from SpringerLink