MEMS comb-drive electret energy harvester charged after packaging
| Autor: | Seonwoo Kim, Yuji Suzuki |
|---|---|
| Rok vydání: | 2016 |
| Předmět: |
010302 applied physics
Microelectromechanical systems Materials science business.industry Oscillation Attenuation Electrical engineering 02 engineering and technology Photoionization 021001 nanoscience & nanotechnology 01 natural sciences Energy harvester Comb drive 0103 physical sciences Optoelectronics Electric potential Electret 0210 nano-technology business |
| Zdroj: | 2016 IEEE SENSORS. |
| Popis: | A MEMS electret energy harvester charged with soft X-ray after packaging is investigated, which should improve the long-term stability of electrets. A charging model for estimation of accurate charging time is developed, by considering attenuation of the soft X-ray at the lid material. The present model is verified with surface potential measurements of electrets. With a prototype MEMS electret energy harvester packaged with 0.1mm-thick aluminum lid, vertical electret on the comb drives has been uniformly charged with soft X-ray photoionization, and up to 1.99 μW has been obtained at 601 Hz and 2.0 g oscillation, which shows the effectiveness of 29%. |
| Databáze: | OpenAIRE |
| Externí odkaz: |
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